Development of a Low Energy Carbon Molecular Ion Source

Citation:

S. Yamamoto, N. Miyamoto, T. Kasuya, M. R. Vasquez, and M. Wada. 2016. “Development of a Low Energy Carbon Molecular Ion Source.” In 2016 21st International Conference on Ion Implantation Technology (IIT), Pp. 1-4. Date Presented: Sep..

Abstract:

Carbon molecular ions were extracted from an ion source operated with a carbon filament cathode. The mass spectrum of the extracted beam showed a higher current of diatomic carbon molecular ions than atomic carbon ions. The magnetic filter field successfully reduced extraction of smaller mass ions, to make molecular carbon ion current comparable to the ion current of helium, which was used as a discharge support gas.