
@conference {7882861,
	title = {Development of a Low Energy Carbon Molecular Ion Source},
	booktitle = {2016 21st International Conference on Ion Implantation Technology (IIT)},
	year = {2016},
	month = {Sep.},
	pages = {1-4},
	abstract = {Carbon molecular ions were extracted from an ion source operated with a carbon filament cathode. The mass spectrum of the extracted beam showed a higher current of diatomic carbon molecular ions than atomic carbon ions. The magnetic filter field successfully reduced extraction of smaller mass ions, to make molecular carbon ion current comparable to the ion current of helium, which was used as a discharge support gas.},
	keywords = {carbon, carbon filament cathode, diatomic carbon molecular ions, Discharges (electric), Fault location, ion implantation, ion sources, low energy carbon molecular ion source, Plasmas, thermionic cathodes},
	doi = {10.1109/IIT.2016.7882861},
	author = {S. Yamamoto and N. Miyamoto and T. Kasuya and Vasquez,M. R. and Wada,M.}
}
