
<?xml version="1.0" encoding="UTF-8"?><xml><records><record><source-app name="Biblio" version="7.x">Drupal-Biblio</source-app><ref-type>47</ref-type><contributors><authors><author><style face="normal" font="default" size="100%">S. Yamamoto</style></author><author><style face="normal" font="default" size="100%">N. Miyamoto</style></author><author><style face="normal" font="default" size="100%">T. Kasuya</style></author><author><style face="normal" font="default" size="100%">Vasquez,M. R.</style></author><author><style face="normal" font="default" size="100%">Wada,M.</style></author></authors></contributors><titles><title><style face="normal" font="default" size="100%">Development of a Low Energy Carbon Molecular Ion Source</style></title><secondary-title><style face="normal" font="default" size="100%">2016 21st International Conference on Ion Implantation Technology (IIT)</style></secondary-title></titles><keywords><keyword><style  face="normal" font="default" size="100%">carbon</style></keyword><keyword><style  face="normal" font="default" size="100%">carbon filament cathode</style></keyword><keyword><style  face="normal" font="default" size="100%">diatomic carbon molecular ions</style></keyword><keyword><style  face="normal" font="default" size="100%">Discharges (electric)</style></keyword><keyword><style  face="normal" font="default" size="100%">Fault location</style></keyword><keyword><style  face="normal" font="default" size="100%">ion implantation</style></keyword><keyword><style  face="normal" font="default" size="100%">ion sources</style></keyword><keyword><style  face="normal" font="default" size="100%">low energy carbon molecular ion source</style></keyword><keyword><style  face="normal" font="default" size="100%">Plasmas</style></keyword><keyword><style  face="normal" font="default" size="100%">thermionic cathodes</style></keyword></keywords><dates><year><style  face="normal" font="default" size="100%">2016</style></year><pub-dates><date><style  face="normal" font="default" size="100%">Sep.</style></date></pub-dates></dates><pages><style face="normal" font="default" size="100%">1-4</style></pages><language><style face="normal" font="default" size="100%">eng</style></language><abstract><style face="normal" font="default" size="100%">Carbon molecular ions were extracted from an ion source operated with a carbon filament cathode. The mass spectrum of the extracted beam showed a higher current of diatomic carbon molecular ions than atomic carbon ions. The magnetic filter field successfully reduced extraction of smaller mass ions, to make molecular carbon ion current comparable to the ion current of helium, which was used as a discharge support gas.</style></abstract></record></records></xml>