
@article {doi:10.1063/1.4932988,
	title = {Low-energy ion beam-based deposition of gallium nitride},
	journal = {Review of Scientific Instruments},
	volume = {87},
	number = {2},
	year = {2016},
	pages = {02C103},
	doi = {10.1063/1.4932988},
	url = {https://doi.org/10.1063/1.4932988},
	author = {Vasquez,M. R. and Wada,M.}
}
