
@article {doi:10.1063/1.4934207,
	title = {Extraction characteristics of a low-energy ion beam system with a remote plasma chamber},
	journal = {Review of Scientific Instruments},
	volume = {87},
	number = {2},
	year = {2016},
	pages = {02B924},
	doi = {10.1063/1.4934207},
	url = {https://doi.org/10.1063/1.4934207},
	author = {Vasquez,M. R. and Wada,M.}
}
